The Zeiss EVO SEM is equipped with a Gatan XuM for X-ray computed tomography. This complements the SEM imaging that provides 2D information. For the XCT modality, X-rays are generated by focusing the electron beam onto a metal target, which are transmitted through the sample and captured onto a small detector. Typical applications would be in the life sciences for the analysis and reconstruction of biological specimens. The microscope is hosted at the clean rooms at
‣ optimised for 4-12kV operation
‣ selection of targets (bulk and thin), ~200nm resolution capabilities
‣ phase enhanced contrast
‣ 1340x1300 camera
‣ samples 1-2mm and below